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Summary: 1
Microfabrication and Characterization of Evolutionary MEMS Resonators
Raffi Kamalian
Faculty of Design, Kyushu University
4-9-1 Shiobaru Minami-ku, Fukuoka, 815-8540
JAPAN
Ying Zhang, Alice M. Agogino
Department of Mechanical Engineering, UC Berkeley
Etcheverry Hall, Berkeley, CA 94720
USA
Abstract:
Microelectromechanical resonators have been fabricated using
the MUMPs process, and characterized. The results of this
characterization study are used to provide valuable feedback to
improve our MEMS design tool based on the use of
evolutionary synthesis algorithms known as genetic algorithms.
This tool automatically generates designs that meet the user's
performance goals and design constraints. To provide the
necessary material property and fabrication parameters
required to predict design performance, test designs for a
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