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Summary: CCEC Seminar
Wireless Sensors for SemiconductorWireless Sensors for Semiconductor
ManufacturingManufacturing
Professor Kameshwar Poolla
Professor of Mechanical Engineering and EECS
University of California, Berkeley
Friday, April 8th, 2005
3:00 - 4:00 pm
Engineering I Room 2162
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For more information, contact the CCEC at 805-893-7066 or ccec@ece.ucsb.edu
ABSTRACT:
The time has come the Walrus said,
To speak of many things,
Of Silicon chips, and sensing tricks,
And the joy entrepreneurship brings.
Of thermal maps, and even Profit perhaps.
In this talk, we describe our efforts in developing a new class of wireless sensors for use in semiconductor
manufacturing. These sensors are fully self-contained with on board power, communications, and signal
processing electronics. They externally resemble standard silicon wafers compatible with standard
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