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Summary: Technical Note
High breakdown MIM structures on bulk AlN
B. Luo a
, J.W. Johnson a
, O. Kryliouk a
, F. Ren a,*, S.J. Pearton b
, S.N.G. Chu c
,
A.E. Nikolaev d
, Yu.V. Melnik e
, V.A. Dmitriev e
, T.J. Anderson a
a
Department of Chemical Engineering, University of Florida, P.O. Box 116005, Gainesville, FL 32611, USA
b
Department of Materials Science and Engineering, University of Florida, Gainesville, FL 32611, USA
c
Agere Systems, Murray Hill, NJ 07974, USA
d
Ioffe Institute, St. Petersburg, 194021, Russia
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