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Microelectromechanical Systems Opportunities

Summary: 1
Systems Opportunities
A Department of Defense Dual-Use
Technology Industrial Assessment
As military information systems increasingly leave command centers and
appear in weapons systems and in the pockets and palms of combatants,
they are getting closer to the physical world, creating new opportunities for
perceiving and controlling the battlefield environment. To exploit these
opportunities, information systems will need to sense and act as well as com-
pute. Filling this need is the driving force for the development of microelec-
tromechanical systems (MEMS).
Using the fabrication techniques and materials of microelectronics as a
basis, MEMS processes construct both mechanical and electrical compo-
nents. Mechanical components in MEMS, like transistors in microelectron-
ics, have dimensions that are measured in microns and numbers measured
from a few to millions. MEMS is not about any one single application or
device, nor is it defined by a single fabrication process or limited to a few
materials. More than anything else, MEMS is a fabrication approach that


Source: Akin, Tayfun - Department of Electrical and Electronics Engineering, Middle East Technical University


Collections: Engineering