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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 16, NO. 5, OCTOBER 2007 1025 Ultrathick and High-Aspect-Ratio Nickel
 

Summary: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 16, NO. 5, OCTOBER 2007 1025
Ultrathick and High-Aspect-Ratio Nickel
Microgyroscope Using EFAB Multilayer
Additive Electroforming
Said Emre Alper, Ilker Ender Ocak, and Tayfun Akin, Member, IEEE
Abstract--This paper presents a new approach for the devel-
opment of a microgyroscope that has a 240-Ám-thick multilayer
electroformed-nickel structural mass and a lateral aspect ratio
greater than 100. The gyroscope is fabricated using commercial
multilayer additive electroforming process EFAB of Microfabrica,
Inc., which allows defining the thickness of different structural re-
gions, such as suspensions, proof mass, and capacitive electrodes,
unlike many classical surface-micromachining technologies that
require a uniform thickness for the structural features. The ca-
pacitive gaps of the gyroscope are designed to be laying parallel
to the substrate plane and can be set as small as 4 Ám, and
therefore, the lateral aspect ratio, which is defined as the ratio of
the overlap length of capacitor plates to the gap spacing, can easily
exceed 100. The high capacitive aspect ratio, multilayer capacitors,
and thick proof mass altogether yield a highly sensitive gyroscope

  

Source: Akin, Tayfun - Department of Electrical and Electronics Engineering, Middle East Technical University

 

Collections: Engineering