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Summary: ELECTROLYSIS-BASED DIAPHRAGM ACTUATORS
Changlin Pang1
, Yu-Chong Tai1
, Joel W. Burdick2
, and Richard A. Andersen3
1
Caltech Micromachining Lab, California Institute of Technology, Pasadena, CA 91125, USA
Tel: (626) 395-2254; Fax: (626) 584-9104; E-mail: changlin@caltech.edu
2
Department of Mechanical Engineering, California Institute of Technology, Pasadena, CA 91125, USA
3
Division of Biology, California Institute of Technology, Pasadena, CA 91125, USA
Recent studies using neuroprobes indicate that it is highly desirable for the probes to have moving (both
forward and backward) capability so that it can track a specific neuron in the brain, because live neurons do
move around. However, for brain use, the movable neuroprobes need to be powerful (to penetrate brain
tissue), high density, low power, bidirectional and latchable (without power). We have since proposed to
develop electrolysis-based actuators for the movable probes. This work presents our initial work on a large-
force bidirectional electrolysis actuator fabricated with MEMS technology. Up to 100µm (comparable to the
averaged neuron-to-neuron distance) of movement was achieved by a 3-mm diaphragm. The bidirectional
movement can be linearly controlled by small currents. The actuator is proved latchable. Overall the results
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