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The fabrication and material properties of compositionally multilayered Ba1-xSrxTiO3 thin films for realization of temperature insensitive tunable
 

Summary: The fabrication and material properties of compositionally multilayered
Ba1-xSrxTiO3 thin films for realization of temperature insensitive tunable
phase shifter devices
M. W. Cole,a
E. Ngo, S. Hirsch, and J. D. Demaree
U.S. Army Research Laboratory, Weapons and Materials Research Directorate, Aberdeen Proving Ground,
Maryland 21005
S. Zhong and S. P. Alpayb
Materials Science and Engineering Program, CMBE Department, and Institute of Materials Science,
University of Connecticut, Storrs, Connecticut 06269
Received 12 January 2007; accepted 17 June 2007; published online 6 August 2007
Compositionally layered BaxSr1-xTiO3 Ba0.60Sr0.40TiO3­Ba0.75Sr0.25TiO3­Ba0.90Sr0.10TiO3
220 nm thin film heterostructures were fabricated on Pt coated high resistivity Si substrates via the
metal organic solution deposition technique MOSD . Optimization of the material design was
achieved by evaluating two integration schemes, namely, the single- and multianneal process
protocols. Materials characterization demonstrated that both film process protocols resulted in
smooth, dense, crack-free films with a single phase perovskite structure. Rutherford backscattering
spectroscopy revealed compositionally distinct layers and severe elemental interdiffusion for the
films fabricated via the multianneal and single-anneal process protocols, respectively. The retention
of the compositional layering subsequent to film crystallization deemed the multianneal processed

  

Source: Alpay, S. Pamir - Department of Materials Science and Engineering, University of Connecticut

 

Collections: Materials Science