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TEMPERATURE-STABLE HIGH-Q ALN-ON-SILICON RESONATORS WITH
EMBEDDED ARRAY OF OXIDE PILLARS
R. Tabrizian, G. Casinovi, and F. Ayazi
Georgia Institue of Technology, Atlanta, Georgia, USA
ABSTRACT
This paper reports on a new temperature compensation
technique for high-Q AlN-on-Silicon bulk acoustic wave
resonators. A uniform array of silicon dioxide (SiO2) pillars are

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

Collections: Engineering