Summary: Spontaneous formation of patterns on sputtered surfaces
Eric Chason a,*, Michael J. Aziz b
Division of Engineering, Brown University, Box D, Providence, RI 02912, USA
Division of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA
Accepted 23 July 2003
Sputtering by collimated low energy ion beams can spontaneously create periodic structures on many surfaces. The
pattern results from the balance between roughening by atom removal and smoothing, typically by surface diffusion.
Experiments on a number of surfaces are considered in terms of linear and non-linear models of surface evolution.
Ó 2003 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
Keywords: Self-organization and patterning; Surface structure; Ion beam processing; Sputtering
Controlling and manipulating surface mor-
phology on the nano- and micro-scale is important
for many present and future technological appli-
cations. As length scales decrease below the range
easily accessible by lithographic patterning, there
is great interest in developing processes to form