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A Compact Model For Dielectric Charging in RF MEMS Capacitive Switches
 

Summary: A Compact Model For Dielectric Charging in RF
MEMS Capacitive Switches
Prasad S. Sumant,1
Narayana R. Aluru,1
Andreas C. Cangellaris2
1
Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign,
1206 W. Green St., Urbana, IL 61801
2
Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign,
1406 W. Green St., Urbana, IL 61801
Received 5 February 2008; accepted 3 May 2008
ABSTRACT: A unified, macroscopic, one-dimensional model is presented for the quantita-
tive description of the process of dielectric charging in radio frequency micro-electro-
mechanical systems (RF MEMS) switches. The fidelity of the model relies on the utilization
of experimentally obtained data to assign values to model parameters that capture the non-
linear behavior of the dielectric charging process. The proposed model can be easily cast in
the form of a simple simulation program with integrated circuit emphasis (SPICE) circuit.
Its compact, physics-based form enables its seamless insertion in nonlinear, SPICE-like, cir-
cuit simulators and makes it compatible with system-level MEMS computer-aided analysis

  

Source: Aluru, Narayana R. - Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign

 

Collections: Engineering; Materials Science