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Physical and Control System Design Challenges in Large Range Nanopositioning

Summary: Physical and Control System Design Challenges
in Large Range Nanopositioning
Shorya Awtar, Gaurav Parmar
University of Michigan, Ann Arbor, MI 48109 USA
(E-mails: awtar@umich.edu, parmar@umich.edu)
Abstract: There is an increasing need for compact desktop-size nanopositioning systems that can provide
motion range of the order of several millimeters and yet achieve nanometric precision, resolution, and
accuracy. In this paper, we highlight the several challenges that exist in the physical and control system
design of a multi-axis flexure-based XY nanopositioning system capable of large dynamic range (~107
There are practical limitations associated with the individual physical components (flexure bearing,
actuators, sensors, drivers, and microcontroller) as well as their integration. Once these physical system
design challenges are overcome, the ensuing control system design challenges include non-linear
structural dynamics due to large deformation of the flexure bearing, non-collocated and multiple sensors
and actuators, multiple sources of disturbance and noise, and classical closed-loop performance tradeoffs.
Keywords: Nanopositioning System, Parallel Kinematic, Motion Control, Flexure Mechanism,
Mechanical Compliance, Performance Tradeoffs
A nanopositioning system is a mechatronic motion system
capable of nanometric motion quality, which is defined in


Source: Awtar, Shorya - Department of Mechanical Engineering, University of Michigan


Collections: Engineering