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Electrostatic actuation of silicon optomechanical Suresh Sridaran1,*
 

Summary: Electrostatic actuation of silicon optomechanical
resonators
Suresh Sridaran1,*
and Sunil A. Bhave1,2
1
OxideMEMS Lab, School of Electrical and Computer Engineering, Cornell University, Ithaca, New York 14853,
USA
2
sunil@ece.cornell.edu
*ss625@cornell.edu
Abstract: Cavity optomechanical systems offer one of the most sensitive
methods for detecting mechanical motion using shifts in the optical
resonance frequency of the optomechanical resonator. Presently, these
systems are used for measuring mechanical thermal noise displacement or
mechanical motion actuated by optical forces. Electrostatic capacitive
actuation and detection have been shown previously for silicon micro
electro mechanical resonators for application in filters and oscillators. Here,
we demonstrate monolithic integration of electrostatic capacitive actuation
with optical sensing using silicon optomechanical disk resonators and
waveguides. The electrically excited mechanical motion is observed as an

  

Source: Afshari, Ehsan - School of Electrical and Computer Engineering, Cornell University

 

Collections: Engineering