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Summary: Hierarchical MEMS Synthesis and Optimization
Ying Zhang1
, Raffi Kamalian2
, Alice M. Agogino3
, and Carlo H. Séquin4
1
Systems Engineering Program, University of California, Berkeley
2, 3
Department of Mechanical Engineering, University of California, Berkeley
4
Department of Electrical Engineering and Computer Sciences, University of California, Berkeley
ABSTRACT
A hierarchical MEMS synthesis and optimization architecture has been developed for MEMS design automation. The
architecture integrates an object-oriented component library with a MEMS simulation tool and two levels of
optimization: global genetic algorithms and local gradient-based refinement. An object-oriented data structure is used to
represent hierarchical levels of elements in the design library and their connectivity. Additionally, all elements
encapsulate instructions and restrictions for the genetic operations of mutation and crossover. The parameterized
component library includes distinct low-level primitive elements and high-level clusters of primitive elements. Surface
micro-machined suspended resonators are used as an example to introduce the hierarchical MEMS synthesis and
optimization process.
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