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A Phase-Noise Model for Nonlinear Piezoelectrically-Actuated MEMS Oscillators

Summary: A Phase-Noise Model for Nonlinear
Piezoelectrically-Actuated MEMS Oscillators
Mauricio Pardo1,2
, Logan Sorenson1
, Farrokh Ayazi1
Georgia Institute of Technology, Atlanta, Georgia, USA
Fundación Universidad del Norte, Barranquilla, Colombia
Email: mpardo@gatech.edu
Abstract--This paper presents a new empirical
exponential-series-based model that describes the measured
phase-noise (PN) of a nonlinear piezoelectric MEMS oscillator.
Since the order of terms in the Leeson's model can only provide
at maximum -30 dB/dec slope, a model with higher order terms
is proposed to determine an effective resonator quality factor
(Qeff) and reflect the reduced contribution of the amplifier
flicker-noise. The average fitting error of the proposed model to
a 23 MHz in-plane shear (IPS) mode oscillator is found to be less
than 1%. Nonlinear operation produces an oscillator with a PN


Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology


Collections: Engineering