Summary: HIGH PERFORMANCE MATCHED-MODE TUNING FORK GYROSCOPE
M.F. Zaman, A. Sharma, and F. Ayazi
Integrated MEMS Laboratory
Georgia Institute of Technology, Atlanta, Georgia, USA
This paper presents the perfect matched-mode operation of a
type I non-degenerate z-axis tuning-fork gyroscope (i.e., 0
Hz frequency split between high-Q drive and sense modes).
The matched-mode tuning fork gyroscope (M2
fabricated on 50-µm thick SOI substrate and displays an
overall rate sensitivity of 24.2 mV/º/s. Allan Variance
analysis of the mode-matched device demonstrates an angle
random walk (ARW) of 0.045 º/ hr and a measured bias
instability of 0.96 º/hr. Temperature characterization of the
-TFG verifies that mode matching is maintained over a
temperature range of 20-100 °C.
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