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Meshless analysis of piezoelectric devices R. R. Ohs, N. R. Aluru

Summary: Meshless analysis of piezoelectric devices
R. R. Ohs, N. R. Aluru
Abstract The sensor and actuator properties of piezo-
electric materials make them well suited for applications in
a variety of microelectromechanical systems (MEMS).
Simulating the response of piezoelectric devices requires
solving coupled electrical and mechanical partial differ-
ential equations. In this paper, we have implemented a
meshless point collocation method (PCM) to solve the
governing equations. Interpolation functions are con-
structed from a reproducing kernel approximation, and
the governing equations are discretized using a collocation
approach. PCM is implemented using either a relaxation
algorithm or a fully-coupled algorithm. Comparisons be-
tween the two algorithms are given. To demonstrate the
performance of PCM, the behavior of two static single-
layer problems and a piezoelectric bimorph have been
modeled. The bimorph analysis is extended to model a
prototype MEMS device.


Source: Aluru, Narayana R. - Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign


Collections: Engineering; Materials Science