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Summary: 1 Copyright © 2006 by ASME
Proceedings of IMECE2006:
2006 ASME International Mechanical Engineering Congress and Exposition
November 5-10, 2006, Chicago, Illinois, USA
IMECE2006-14905
RESTORING FORCE SURFACE ANALYSIS OF NONLINEAR VIBRATION DATA
FROM MICRO-CANTILEVER BEAMS
Matthew S. Allen*
, Hartono Sumali & David S. Epp
Sandia National Laboratories
Albuquerque, New Mexico 87185
*
Corresponding author, Email: msalle@sandia.gov, alternate contact: H. Sumali, hsumali@sandia.gov .
Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United States Department of
Energy's National Nuclear Security Administration under Contract DE-AC04-94AL85000.
ABSTRACT
The responses of micro-cantilever beams, with lengths
ranging from 100-1500 microns, have been found to exhibit
nonlinear dynamic characteristics at very low vibration
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