Summary: Numerical analysis of 3D electrostatics of deformable
conductors using a Lagrangian approach
, N.R. Alurua,*, S. Mukherjeeb
Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA
Department of Theoretical and Applied Mechanics, Cornell University, Ithaca, NY 14853, USA
Received 24 April 2003; revised 16 June 2003; accepted 15 August 2003
In this paper, we introduce a Lagrangian approach for 3D electrostatic analysis. In this approach, when the conductors undergo
deformation or shape changes, the surface charge densities on the deformed conductors can be computed without updating the geometry of
the conductors. This alleviates the computation-intensive task of remeshing the structure and regeneration of shape functions.
q 2003 Elsevier Ltd. All rights reserved.
Keywords: Lagrangian approach; 3D electrostatics; Boundary element method
Electrostatic systems are frequently encountered in
semiconductor, MEMS and nanotechnology applications.
Electrostatic conductors are used as interconnects in
Integrated Circuit (IC) technology and as sensors and