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Sensors and Actuators A 111 (2004) 7178 Voltage-tunable piezoelectrically-transduced single-crystal silicon

Summary: Sensors and Actuators A 111 (2004) 71­78
Voltage-tunable piezoelectrically-transduced single-crystal silicon
micromechanical resonators
Gianluca Piazza, Reza Abdolvand, Gavin K. Ho, Farrokh Ayazi
School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0250, USA
Received 19 August 2003
This paper reports on a new class of high-Q single-crystal silicon (SCS) resonators that are piezoelectrically actuated and sensed, and
have voltage-tunable center frequencies. The resonating element is made out of the SCS device layer of a SOI wafer. In a unique manner,
piezoelectric transduction was integrated with capacitive fine-tuning of the resonator center frequencies to compensate for any process
variations. Quality factor as high as 6200 was measured for the 1.7 MHz first resonance mode of a clamped­clamped beam resonator in
50 mTorr vacuum. Higher order modes of the fabricated resonators were also successfully actuated and demonstrated quality factors larger
than 2000 (under vacuum) at frequencies approaching 17 MHz. A 6 kHz tuning range was measured for a 719 kHz resonator by applying
a dc voltage in the range of 0­20 V.
© 2003 Elsevier B.V. All rights reserved.
Keywords: MEMS; Voltage-tunable resonator; Single-crystal silicon; Piezoelectric film; SOI substrate
1. Introduction
Advanced consumer electronics such as miniature radios
and wristwatch cellular phones pose severe limitations on
the size and cost of the frequency selective units contained


Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology


Collections: Engineering