Summary: Weakly bound buffer layer as a template for metallic
nano-clusters growth and film laser-patterning
Elad Gross, Ori Stein, Micha Asscher *
Department of Physical Chemistry and The Farkas Center for Light Induced Processes, The Hebrew University of Jerusalem, Israel
Available online 1 February 2007
Growth of metallic nano-clusters and control over their size are critically important for catalysis. Development of film patterning procedures at
the nanometer scale has significant impact on future lithography. In this work, we present an approach to grow metallic nano-clusters and control
their size using a weakly bound buffer layer as an intermediate substance and a template to control the clusters size at the range 115 nm.
The buffer layer was further employed to create a pattern based on a selective laser ablation procedure. A thicker metallic film deposited on top
of pre-patterned buffer layer has been demonstrated as a novel patterning technique at the sub-micron to nanometer scale employing a single laser
pulse. The thermal stability of metallic structures prepared this way has been studied at temperature up to 1000 K.
# 2007 Elsevier B.V. All rights reserved.
Keywords: Metallic nano-clusters; Film laser-patterning; Buffer layer
Transition metal clusters are known for decades as the
chemically active sites when supported on the surface of a
support oxide that compose heterogeneous catalysts . The
introduction of STM has enabled close inspection of the
correlation between size and shape of the metallic clusters with