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TOPOLOGY EVOLUTION OF HIGH PERFORMANCE XY FLEXURE STAGES
 

Summary: TOPOLOGY EVOLUTION OF HIGH PERFORMANCE
XY FLEXURE STAGES
Shorya Awtar, Alexander H. Slocum
Precision Engineering Research Group, Massachusetts Institute of Technology
77 Massachusetts Avenue, 3-445, Cambridge MA 02139
shorya@mit.edu, slocum@mit.edu
Abstract
This paper presents a systematic constraint-based approach to the topology design of large motion range
XY flexure stages. A generic parallel-kinematic constraint pattern is proposed with consideration to
important performance metrics such as error motions, actuator isolation, and stiffness variation. Single
DOF flexure modules are employed as constraint elements to construct XY flexure designs based on the
proposed constraint pattern. Variations in the choice of constraint modules and the degree of geometric
symmetry result in the evolution of high-performance flexure stages. Tradeoffs in performance are
highlighted as these designs are discussed and compared. Analytical prediction and experimental
measurement of the performance of a selected design are presented.
Keywords: XY Flexure, Constraint-based Design, Topology Synthesis
Introduction and Background
Despite the simplicity of serial stages, compactness, precision and manufacturability concerns make
parallel stages preferable at the meso and micro scales. However, large range of motion has traditionally
been a challenge in parallel kinematic designs due to problems associated with overconstraint and error

  

Source: Awtar, Shorya - Department of Mechanical Engineering, University of Michigan

 

Collections: Engineering