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Mass Redistribution Causes the Structural Richness of Ion-Irradiated Surfaces Charbel S. Madi,1
 

Summary: Mass Redistribution Causes the Structural Richness of Ion-Irradiated Surfaces
Charbel S. Madi,1
Eitan Anzenberg,2
Karl F. Ludwig, Jr.,2
and Michael J. Aziz1
1
Harvard School of Engineering and Applied Sciences, Cambridge Massachusetts 02138, USA
2
Department of Physics, Boston University, Boston Massachusetts 02215, USA
(Received 2 June 2010; published 8 February 2011)
We show that the ``sputter patterning'' topographical instability is determined by the effects of ion
impact-induced prompt atomic redistribution and that erosion--the consensus predominant cause--is
essentially irrelevant. We use grazing incidence small angle x-ray scattering to measure in situ the
damping of noise or its amplification into patterns via the linear dispersion relation. A model based on
the effects of impact-induced redistribution of those atoms that are not sputtered away explains both the
observed ultrasmoothening at low angles from normal incidence and the instability at higher angles.
DOI: 10.1103/PhysRevLett.106.066101 PACS numbers: 68.49.Sf, 81.16.Rf, 81.65.Cf
Spontaneous self-organization processes have aroused
intense interest due to their potential for transcending the
constraints of lithography for device fabrication. Uniform

  

Source: Aziz, Michael J.- School of Engineering and Applied Sciences, Harvard University

 

Collections: Physics; Materials Science