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Secondary ion mass spectrometry depth profiling of amorphous polymer multilayers using O2
 

Summary: Secondary ion mass spectrometry depth profiling of amorphous polymer
multilayers using O2
+
and Cs+
ion bombardment with a magnetic
sector instrument
S. E. Harton
Department of Materials Science and Engineering, North Carolina State University, Raleigh, North
Carolina 27695
F. A. Stevie
Analytical Instrumentation Facility, North Carolina State University, Raleigh, North Carolina 27695
H. Adea
Department of Physics, North Carolina State University, Raleigh, North Carolina 27695
Received 22 September 2005; accepted 17 January 2006; published 27 February 2006
Thin planar polymer films are model systems in a number of fields, including nano- and
biotechnology. In contrast to reciprocal space techniques such as reflectivity or diffraction,
secondary ion mass spectrometry SIMS can provide depth profiles of tracer labeled polymers in
real space directly with sufficient depth resolution to characterize many important aspects in these
systems. Yet, continued improvements in characterization methods are highly desirable in order to
optimize the trade-offs between depth resolution, mass resolution, detection sensitivity, data

  

Source: Ade, Harald W.- Department of Physics, North Carolina State University

 

Collections: Physics