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Summary: FACET:
A two dimensional simulator of
polycrystalline thin film growth
FACET:
A two dimensional simulator of
polycrystalline thin film growth
Jie Zhang, James B. Adams
Chemical and Materials Engineering Dept.,
Arizona State University
12/1/2000
Goal of FACET:Goal of FACET:
Simulation of growth of polycrystalline thin films
§ Predict : Film topography, grain size, shape and
texture as a function of: Deposition Flux,
Temperature, Surface Texture
§ Real-time, real dimension visualization,
No third-party software needed
§ A Windows® package; Runs on a PC;
Graphical User Interface.
FACET: AssumptionsFACET: Assumptions
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