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IEEE JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 8, NO. 3, SEPTEMBER 1999 335 Analytical Modeling of Electrostatic
 

Summary: IEEE JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 8, NO. 3, SEPTEMBER 1999 335
Analytical Modeling of Electrostatic
Membrane Actuator for Micro Pumps
M. T. A. Saif, B. Erdem Alaca, and Huseyin Sehitoglu
Abstract-- A large class of micro pumps consists of a cavity
in a substrate, a diaphragm that seals the cavity, and inlets and
outlets for the cavity which are controlled by valves. The cavity is
initially filled with a fluid. The diaphragm is then actuated by a
voltage between the diaphragm and the cavity floor to compress
the fluid. When the pressure exceeds a certain value, the fluid is
expelled. During actuation, the electrostatic attractive force of the
substrate and the pressure rise in the fluid lead to the bending and
stretching of the diaphragm. Thus, the prediction of the pump
performance (e.g., fluid pressure, diaphragm stresses) requires
the solution of a coupled nonlinear elasto-electro-hydrodynamic
problem. In this paper, a simplified analytical model is developed
to predict the state of an electrostatically actuated micro pump
at equilibrium. The state includes the deformed shape and the
internal stresses of the diaphragm and the pressure of the fluid
when the actuator is subjected to a given applied dc voltage. The

  

Source: Alaca, B. Erdem - Department of Mechanical Engineering, Koc University

 

Collections: Engineering