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Motional Impedance Analysis: Bridging the `Gap' in Dielectric Transduction
 

Summary: Motional Impedance Analysis: Bridging the `Gap' in
Dielectric Transduction
Siddharth Tallur, Tiffany J. Cheng, Suresh Sridaran,
Sunil A. Bhave
OxideMEMS Laboratory, Cornell University
Ithaca, NY USA
Abstract -- This paper presents an analytical model to estimate
the motional resistance for partial air gap capacitively-
transduced MEMS resonators. This model serves as a link
between the well formulated analytical models for conventional
air gap and internal dielectric transduction schemes, thereby
helping decide which scheme is optimal for a given design
frequency. Using this model, we simulate and experimentally
verify the motional resistance for a 303MHz polysilicon disk
resonator within a 5% range of accuracy.
I. INTRODUCTION
Semiconductor electromechanical resonators, with quality
factors (Q) often >10000, provide a low-power small-
footprint CMOS-compatible alternative to various electrical
components in wireless communication and signal

  

Source: Afshari, Ehsan - School of Electrical and Computer Engineering, Cornell University

 

Collections: Engineering