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1 Copyright 2010 by ASME Proceedings of the ASME 2010 International Design Engineering Technical Conferences &
 

Summary: 1 Copyright 2010 by ASME
Proceedings of the ASME 2010 International Design Engineering Technical Conferences &
Computers and Information in Engineering Conference
IDETC/CIE 2010
August 15 - 18, 2010, Montreal, Quebec, Canada
DETC2010-28943
AN ENHANCED STABILITY MODEL FOR ELECTROSTATIC COMB-DRIVE
ACTUATOR DESIGN
Tristan T. Trutna and Shorya Awtar*
Precision Systems Design Laboratory
Mechanical Engineering, University of Michigan
Ann Arbor MI 48109
ABSTRACT
This paper presents a stability model for predicting the
snap-in behavior of electrostatic comb-drive actuators, while
taking into account the bearing direction stiffness and error
motion of the associated flexure suspension. Error motions
typically arise from the flexure suspension kinematics or
manufacturing variations. The presented model allows for a
more accurate determination of the comb-drive actuator's

  

Source: Awtar, Shorya - Department of Mechanical Engineering, University of Michigan

 

Collections: Engineering