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A Wireless Batch Sealed Absolute Capacitive Pressure Sensor Orhan Akar1

Summary: A Wireless Batch Sealed Absolute Capacitive Pressure Sensor
Orhan Akar1
, Tayfun Akin1
, Tim Harpster2
, and Khalil Najafi2
Middle East Technical University, Dept. of Electrical and Electronics Eng., Ankara, Turkey
Center for Integrated Microsystems, The University of Michigan, Ann Arbor, MI 48109
e-mail: tayfun-akin@metu.edu.tr http://www.eee.metu.edu.tr/~tayfuna
Summary. This paper reports the development of an absolute wireless capacitive pressure sensor.
The sensor has a simple structure and is obtained using a capacitive pressure sensor and a gold-
electroplated planar coil that form an LC circuit. Applied pressure deflects the 6 Ám-thin silicon
diaphragm, changing the capacitance, and hence, the resonant frequency of the circuit. This
change is sensed remotely with inductive coupling, eliminating the need for wire connection or
implanted RF telemetry circuits to monitor the applied pressure. The sensor is fabricated using
boron-etch stop technique. Fabricated devices measure 2.6x1.6 mm 2
in size and houses 24 turns
of gold-electroplated coil that has a measured inductance of 1.2 ÁH. The sensor is designed to
provide a resonant frequency change between 95-103MHz for a pressure change in the range 0-


Source: Akin, Tayfun - Department of Electrical and Electronics Engineering, Middle East Technical University


Collections: Engineering