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Summary: Low-Loss MEMS Band-Pass Filters with Improved Out-of-Band Rejection by
Exploiting Inductive Parasitics
Yonghyun Shim1
, Roozbeh Tabrizian2
, Farrokh Ayazi2
, and Mina Rais-Zadeh1
1
Department of Electrical Engineering & Computer Science, University of Michigan, Ann Arbor, MI 48109, USA
2
School of Electrical & Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30308, USA
Abstract
This paper reports on a new implementation of integrated
lumped filters with improved out-of-band rejection and pass-
band loss. Inductive parasitics are exploited to provide
additional transmission zeros at the high frequency end,
which can improve both the out-of-band rejection and roll-off.
Thick silver is electroplated to reduce the insertion loss and
achieve high quality factor. An insertion loss of better than
3dB has been achieved for filters across 220MHz to 640MHz
with unloaded Q as high as 50. The out-of-band rejection of
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