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A Tutorial on the Mechanisms, Dynamics, and Control of Atomic Force Microscopes
 

Summary: A Tutorial on the Mechanisms, Dynamics, and Control
of Atomic Force Microscopes
Daniel Y. Abramovitch, Sean B. Andersson, Lucy Y. Pao, and Georg Schitter
Abstract-- The Atomic Force Microscope (AFM) is one of the
most versatile tools in nanotechnology. For control engineers
this instrument is particularly interesting, since its ability to
image the surface of a sample is entirely dependent upon the
use of a feedback loop. This paper will present a tutorial on
the control of AFMs. We take the reader on a walk around
the control loop and discuss each of the individual technology
components. The major imaging modes are described from a
controls perspective and recent advances geared at increasing
the performance of these microscopes are highlighted.
I. INTRODUCTION
The Atomic Force Microscope (AFM), invented by Bin-
nig, Quate, and Gerber [1], is one of the most versatile
methods of imaging nanoscale structures (see Table I). An
AFM is not restricted to imaging in a vacuum environ-
ment as are the Transmission Electron Microscope (TEM)
and the Scanning Electron Microscope (SEM). The sample

  

Source: Andersson, Sean B. - Department of Aerospace and Mechanical Engineering, Boston University

 

Collections: Engineering