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Patterning thin metallic film via laser structured weakly bound template Gabriel Kerner, Ori Stein, Micha Asscher *
 

Summary: Patterning thin metallic film via laser structured weakly bound template
Gabriel Kerner, Ori Stein, Micha Asscher *
Department of Physical Chemistry and the Farkas Center for light induced processes, The Hebrew University of Jerusalem,
Givat-Ram, 91904 Jerusalem, Israel
Received 6 January 2006; accepted for publication 23 February 2006
Available online 20 March 2006
Abstract
A weakly bound buffer material is structured on a surface by interfering low power laser beams, as a template for patterning metallic
thin films deposited on top. The excess buffer material and metal layer are subsequently removed by a second uniform laser pulse. This
laser pre-structured buffer layer assisted patterning procedure is demonstrated for gold layer forming a grating on a single crystal
Ru(100) under UHV conditions, using Xe as the buffer material. Millimeters long, submicron (0.65 lm) wide wires can be obtained using
laser wavelength of 1.064 lm with sharp edges of less than 30 nm, as determined by AFM. This method provides an all-in-vacuum metal-
lic film patterning procedure at the submicron range, with the potential to be developed down to the nanometer scale upon decreasing the
patterning laser wavelength down to the UV range.
2006 Elsevier B.V. All rights reserved.
Keywords: Weakly bound buffer layer; LITD; Laser patterning
1. Introduction
The concept of laser induced thermal desorption (LITD)
[16] is well established for the patterning of adsorbates on
surfaces, and is widely used in basic surface phenomena

  

Source: Asscher, Micha - Institute of Chemistry, Hebrew University of Jerusalem

 

Collections: Chemistry