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Summary: Micromachined Inertial Sensors
NAVID YAZDI, FARROKH AYAZI, AND KHALIL NAJAFI, SENIOR MEMBER, IEEE
Invited Paper
This paper presents a review of silicon micromachined ac-
celerometers and gyroscopes. Following a brief introduction to
their operating principles and specifications, various device struc-
tures, fabrication technologies, device designs, packaging, and
interface electronics issues, along with the present status in the
commercialization of micromachined inertial sensors, are dis-
cussed. Inertial sensors have seen a steady improvement in their
performance, and today, microaccelerometers can resolve acceler-
ations in the micro-g range, while the performance of gyroscopes
has improved by a factor of 10222 every two years during the past
eight years. This impressive drive to higher performance, lower
cost, greater functionality, higher levels of integration, and higher
volume will continue as new fabrication, circuit, and packaging
techniques are developed to meet the ever increasing demand for
inertial sensors.
Keywords--Accelerometer, gyroscope, inertial sensors, micro-
fabrication technologies, micromachined sensors, micromachin-
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