Summary: 424 MRS BULLETIN · VOLUME 32 · MAY 2007 · www/mrs.org/bulletin
Fundamentals of
Focused Ion Beam
Nanostructural
Processing: Below,
At, and Above the
Surface
Warren J. MoberlyChan, David P. Adams,
Michael J. Aziz, Gerhard Hobler,
and Thomas Schenkel
structures in situ, and provide site-specific
extractions for further ex situ processing or
as sample preparation for other analy-
ses.1­3
Ion beam processing predates FIB,
ranging from processing films for semi-
conductor devices to the preparation of
transmission electron microscopy (TEM)
samples,4
and the ion/surface interaction

Source: Aziz, Michael J.- School of Engineering and Applied Sciences, Harvard University
Ho, Chih-Ming - Mechanical and Aerospace Engineering Department, University of California at Los Angeles
Lawrence Livermore National Laboratory, Electron Beam Ion Trap

Collections: Engineering; Materials Science; Physics