| | |
Summary: THE RESONATING STAR GYROSCOPE
M.F. Zaman, A. Sharma, B.V. Amini, and F. Ayazi
Integrated MEMS Laboratory
Georgia Institute of Technology, Atlanta, Georgia, USA
ABSTRACT
This paper introduces the Resonating Star Gyroscope (RSG),
a new vibratory shell-type structure for rate sensing. The
structure formed as a merged superposition of two square
shells, yields in-plane degenerate flexural modes that are
used to sense z-axis rotation. A high aspect ratio polysilicon
implementation utilizing the primary degenerate flexural
modes of the gyroscope exhibits an open-loop rate
sensitivity of 1.6mV/º/s. The Brownian noise floor of the
sensor with a quality factor (Q) of 1500 and drive amplitude
of 100nm is 0.03º/s/ Hz. The RSG may also function at
higher-order flexural modes. A single crystal silicon design
explores such an operation. Preliminary characterization
results yield matched-mode operation and very high-Q
higher-order degenerate flexural modes (Q~100k).
1. INTRODUCTION
|
