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Weitere Kolloquiumstermine sind im WWW abrufbar. Fakultt II Informatik, Wirtschafts-und

Summary: Weitere Kolloquiumstermine sind im WWW abrufbar.
Fakultät II Informatik, Wirtschafts- und
Department für Informatik
Am Montag, dem 30. Mai 2011, um 15:00 Uhr hält
Prof. Yuelin Wang
Shanghai Institute of Microsystem and Information Technology
einen Vortrag mit dem Titel
MEMS Activity in SIMIT
Der Vortrag findet im OFFIS, Escherweg 2, Konferenzraum F02 statt.
As one of the early beginners, Shanghai institute of micro system and information Technology (SIMIT) started its
MEMS research since the middle of 1980's. In the last twenty years, SIMIT develops not only its ability in bulk
micromaching and surface micromaching technologies but also its capacity in sensors and actuators.
Now SIMIT has 1600 m2
clean room for MEMS fabrication and packaging, and focuses on micro/nano sensors by
means of microelectronic and micromachining fabrication technologies and also explores integrated microsystems
and advanced packaging techniques. Its major research areas include micro/nano scale effects and their characteri-
zation and mechanism, micro and nano compatible fabrication technologies, MEMS wafer fab and packaging,


Source: Appelrath, Hans-Jürgen - Department für Informatik, Carl von Ossietzky Universität Oldenburg


Collections: Computer Technologies and Information Sciences