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A 3MHZ SPOKE GYROSCOPE WITH WIDE BANDWIDTH AND LARGE DYNAMIC RANGE
 

Summary: A 3MHZ SPOKE GYROSCOPE WITH WIDE BANDWIDTH
AND LARGE DYNAMIC RANGE
Wang-kyung Sung, Milap Dalal, and Farrokh Ayazi
Georgia Institute of Technology, USA
ABSTRACT
This paper reports on the design and
characterization of a high-frequency silicon bulk
acoustic wave (BAW) spoke gyroscope operating in
air. The gyroscope described here operates at 3.12MHz
in a near mode-matched condition (without tuning)
and has a 1dB bandwidth of ~1.5kHz. The device has
a linear full-scale range in excess of 30,000/sec with a
sensitivity of 15.0V//sec using a 10V DC
polarization voltage. The wide bandwidth and large
dynamic range of this device are beneficial for
applications requiring rapid motion sensing.
INTRODUCTION
Micromachined vibratory gyroscopes [1] are
increasingly used in applications that require large
dynamic range and large bandwidth such as gaming

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering