Home

About

Advanced Search

Browse by Discipline

Scientific Societies

E-print Alerts

Add E-prints

E-print Network
FAQHELPSITE MAPCONTACT US


  Advanced Search  

 
PZT transduced high-overtone width-extensional resonators above 1 GHz
 

Summary: PZT transduced high-overtone width-extensional
resonators above 1 GHz
Hengky Chandrahalim
and Sunil A. Bhave
School of Electrical and
Computer Engineering
Cornell University
Ithaca, New York 14853, USA
Ronald G. Polcawich,
Jeffrey S. Pulskamp,
and Roger Kaul
US Army Research Laboratory
Adelphi, MD 20783, USA
Abstract--This paper provides the theoretical modeling, sim-
ulation, and quantitative comparison that explore the design
space of PZT-only (Lead Zirconate Titanate) and PZT-on 3, 5
and 10 Ám single-crystal silicon high-overtone width-extensional
mode (WEM) resonators with identical lateral dimensions for in-
corporation into radio frequency microelectromechanical systems
(RF MEMS) filters and oscillators. A novel fabrication technique

  

Source: Afshari, Ehsan - School of Electrical and Computer Engineering, Cornell University

 

Collections: Engineering