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0-7803-5998-4/01/$10.00 @2001 IEEE 566 A LOW COST UNCOOLED INFRARED MICROBOLOMETER
 

Summary: 0-7803-5998-4/01/$10.00 @2001 IEEE 566
A LOW COST UNCOOLED INFRARED MICROBOLOMETER
FOCAL PLANE ARRAY USING THE CMOS N-WELL LAYER
Deniz Sabuncuoglu Tezcan*, Selim Eminoglu*, Orhan Sevket Akar**, and Tayfun Akin*,**
* Department of Electrical and Electronics Engineering, Middle East Technical University, Ankara, Turkey
** TUBITAK-BILTEN, Middle East Technical University, Ankara, Turkey
ABSTRACT
This paper reports a low-cost, 256-pixel uncooled infrared
microbolometer focal plane array (FPA) implemented using a
0.8Ám CMOS process where the n-well layer is used as the active
microbolometer material. The suspended n-well structure is
obtained by simple front-end bulk etching of the fabricated CMOS
dies, while the n-well region is protected from etching by
electrochemical etch-stop technique within a TMAH solution.
Electrical connections to the suspended n-well are obtained with
polysilicon interconnect layer instead of aluminum to increase the
thermal isolation of the pixel by an order of magnitude. Since
polysilicon has very low TCR and high resistance, the effective
TCR of the pixel is reduced to 0.34%/K, even though the n-well
TCR is measured to be 0.58%/K. A 16x16 pixel array prototype

  

Source: Akin, Tayfun - Department of Electrical and Electronics Engineering, Middle East Technical University

 

Collections: Engineering