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Summary: Analytical Solutions to Quantum Drift-
Diffusion Equations for Quantum Mechanical
Modeling of MOS Structures
Shigeyasu Uno a), Henok Abebe b), and Ellis Cumberbatcha)
a) School of Mathematical Sciences, Claremont Graduate University
710 N. College Ave. Claremont, CA 91711, USA
Phone: +1-909-621-8080 Fax: +1-909-607-8261 E-mail: shigeyasu.uno@cgu.edu
b) MOSIS Service, Information Sciences Institute, University of Southern California
4676 Admiralty Way, Marina Del Rey, CA 90292, USA
Modeling Quantum Effects in Inversion Layer
Electron Density
Distance from Si/SiO2 Interface
Substrate
Gate
Oxide
Schrödinger-Poisson Self-consistent Calculation
Hänsch Model, Van Dort Model
Density Gradient Model
·Numerical
·Exact solution
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