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Summary: TWO-AXIS OPTICAL MEMS SCANNER
Shorya Awtar
, Klint A. Rose
, Hoe-Phong Tham
Precision Engineering Research Group, Massachusetts Institute of Technology, MA
Mechanical Engineering, Stanford University, CA,
Precision Engineer
shorya@mit.edu, klint@stanford.edu, thamhp@alum.mit.edu
Abstract
This paper presents the design of a two-axis optical MEMS mirror for use in raster scanning applications.
The design is based on a novel resonant structure that provides two orthogonal and decoupled rotations
of a single mirror. Translational errors of the mirror are eliminated by using the principle of virtual pivot in
cantilever beams. The first few resonance modes and frequencies of the proposed structure are
determined using a lumped-mass analysis, and validated by means of computational FEA. Appropriately
placed PZT electrodes are used to excite the two modes of the structure that correspond to the rotations
required for scanning. A simple fabrication process is suggested for manufacturing the device.
Keywords: Two-axis Scanner, Decoupled Rotations, Virtual Pivot
Introduction and Background
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