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Travel support has been generously provided by the Transducers Research Foundation and by the DARPA MEMS and DARPA BioFlips programs.
 

Summary: Travel support has been generously provided by the Transducers Research Foundation and by the DARPA MEMS and
DARPA BioFlips programs.
Poly-Wire-Coupled Single Crystal Silicon HARPSS Micromechanical Filters
Using Oxide Islands
Reza Abdolvand, Gavin K. Ho, and Farrokh Ayazi
School of Electrical and Computer Engineering, Georgia Institute of Technology
Atlanta, GA 30332-0250
ABSTRACT
This paper reports on the implementation of single crystal
silicon micromechanical filters coupled through a thin polysilicon
wire using a SOI-based HARPSS process. The formation of
suspended thin poly wires, which provide weak mechanical
coupling between high quality factor thick microresonators, are
enabled by the use of thick sacrificial oxide islands created
between adjacent single crystal silicon resonators. The oxide
islands are also used beneath the input and output pads of the
filters to reduce the parasitic capacitances to substrate. Mechanical
coupling of microresonators using thin-film wires provides
superior design flexibility since the material and thickness of the
coupling element can be chosen independent of those of the

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering