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Chapter 6. Fabrication, Assembly and Experimental Test Set-up In the preceding chapters we have proposed several XY flexure mechanism designs, and also a
 

Summary: 157
Chapter 6. Fabrication, Assembly and Experimental Test Set-up
In the preceding chapters we have proposed several XY flexure mechanism designs, and also a
performance analysis for each. Of all the designs considered, Design 6 is chosen for fabrication and
testing because of its large range of motion, low cross-axes coupling errors, small parasitic yaw rotation
of the motion stage, good actuator isolation and thermal insensitivity. The only drawback in this design is
the variation in its inline axial stiffness over the range of motion, which is important while designing the
motion system for a high bandwidth.
The objective of this experimental test set-up is to validate the analytical predications of the previous
chapters. For the particular design being considered, we would like to measure the static, dynamic and
thermal performance. Range of motion, primary stiffness, cross-axes coupling, actuator isolation, parasitic
yaw error, change in inline stiffness are some of the static parameters of interest. Analysis and testing to
determine the dynamic behavior and thermal response are part of the future work planned. Although the
hardware and testing system has been designed to be able to allow all these tests, at present only static
performance tests have been performed.
6.1 Metrology Objectives
It is desirable to measure the following aspects of the XY flexure stage and compare it with the
analytically predicted behavior
- Range of motion and primary stiffness in the X and Y directions
- Variation of primary stiffness in X direction with Y loads, and vice versa

  

Source: Awtar, Shorya - Department of Mechanical Engineering, University of Michigan

 

Collections: Engineering