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MEMS for Integrated Timing and Spectral Processing Farrokh Ayazi
 

Summary: MEMS for Integrated Timing and Spectral Processing
Farrokh Ayazi
Center for MEMS and Microsystems Technology
Georgia Institute of Technology, Atlanta, GA 30332
ayazi@gatech.edu
Abstract - This paper presents a review of micro-
electromechanical devices for frequency references and RF
spectral processing. The application of high-Q pure silicon and
AlN-on-silicon bulk acoustic wave resonators in low phase-noise
reference oscillators is discussed and compensation challenges
are described. Low-loss piezo-acoustic filters and high-Q tunable
and switchable silver passives are presented for applications in
multi-mode front-end modules and spectral processors.
I. INTRODUCTION
With an increasing demand for higher levels of
integration in existing and emerging microsystem applications,
integrated alternatives to discrete frequency-selective devices
are necessary. MEMS can enable a cost-effective integrated
platform for timing, wireless connectivity and multi-band
spectral processing. With the availability of high quality

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering