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Summary: September 15, 2003 / Vol. 28, No. 18 / OPTICS LETTERS 1665
Heat treatment for reduction of surface roughness
on holographic gratings
Rabi Rabady, Dmitry Frankstein, and Ivan Avrutsky
Department of Electrical and Computer Engineering, Wayne State University, Detroit, Michigan 48202
Received May 2, 2003
Controlled postdevelopment heat treatment of the photoresist polymer used in the preparation of holographic
gratings has been shown to enhance the diffraction efficiency of gratings and reduce the scattering losses.
We prove this effect by analyzing the resonant reflection spectra of a waveguide grating and observing the
reduction in the arc-shaped light scattering associated with the excitation of waveguide modes. © 2003
Optical Society of America
OCIS codes: 050.2770, 290.5880, 290.5820.
Diffraction gratings are a key component in many
applications in optics and optoelectronics. They are
used as couplers and dispersing elements in inte-
grated optics, spectroscopy, optical communications,
and biomedical applications. Reducing the surface
roughness is an important aspect of the fabrication
process that ultimately enhances the grating's effi-
ciency and performance. The inhomogeneous coating
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