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Journal of Crystal Growth 307 (2007) 302308 Equilibrium analysis of zirconium carbide CVD growth
 

Summary: Journal of Crystal Growth 307 (2007) 302308
Equilibrium analysis of zirconium carbide CVD growth
Yong Sun Wona
, Venu G. Varanasia
, Olga Kryliouka
, Timothy J. Andersona,,
Lisa McElwee-Whiteb
, Rosa J. Perezc
a
Department of Chemical Engineering, University of Florida, Gainesville, FL 32611-6005, USA
b
Department of Chemistry, University of Florida, Gainesville, FL 32611-7200, USA
c
Department of Materials Science and Engineering, Division of Computational Thermodynamics, Royal Institute of Technology,
KTH, SE-100 44 Stockholm, Sweden
Received 8 March 2007; received in revised form 23 April 2007; accepted 22 May 2007
Communicated by G.B. Stringfellow
Available online 24 May 2007
Abstract
A chemical equilibrium study was performed to investigate the effect of growth parameters on the constitution in ZrC films grown by

  

Source: Anderson, Timothy J. - Chemical Engineering Department, University of Florida

 

Collections: Materials Science