Summary: Journal of Crystal Growth 307 (2007) 302­308
Equilibrium analysis of zirconium carbide CVD growth
Yong Sun Wona
, Venu G. Varanasia
, Olga Kryliouka
, Timothy J. Andersona,Ã,
Lisa McElwee-Whiteb
, Rosa J. Perezc
a
Department of Chemical Engineering, University of Florida, Gainesville, FL 32611-6005, USA
b
Department of Chemistry, University of Florida, Gainesville, FL 32611-7200, USA
c
Department of Materials Science and Engineering, Division of Computational Thermodynamics, Royal Institute of Technology,
KTH, SE-100 44 Stockholm, Sweden
Received 8 March 2007; received in revised form 23 April 2007; accepted 22 May 2007
Communicated by G.B. Stringfellow
Available online 24 May 2007
Abstract
A chemical equilibrium study was performed to investigate the effect of growth parameters on the constitution in ZrC films grown by

Source: Anderson, Timothy J. - Chemical Engineering Department, University of Florida

Collections: Materials Science