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Summary: ONE-DIMENSIONAL LINEAR A
ENHANCEMENT OF ALN
Georgia Ins
ABSTRACT
This work introduces piezo-on-silico
bandgap (LAB) structures, a class o
micro-scale phononic crystal (PC) which
integrated with micromechanical devices
simulations with custom-derived dispe
predict multiple bandgaps for cou
structures into the GHz region. AlN-
supports are replaced with coupled-ring
reduce acoustic loss into the substrate;
bandgaps is experimentally confirmed
spectra of test structures as well as qualit
insertion loss (IL) improvements of
resonators. An IL of 3.8 dB at 178 MHz a
than 11,000 at 600 MHz in air are reporte
KEYWORDS
Phononic crystal, acoustic bandgap, piezo
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