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Microchannel molding: A soft lithography-inspired approach to micrometer-scale patterning
 

Summary: Microchannel molding: A soft lithography-inspired approach
to micrometer-scale patterning
Christopher R. Martin and Ilhan A. Aksaya)
Department of Chemical Engineering, Princeton University Princeton, New Jersey 08544-5263
(Received 17 February 2005; accepted 4 April 2005)
A new patterning technique for the deposition of sol-gels and chemical solution
precursors was developed to address some of the limitations of soft lithography
approaches. When using micromolding in capillaries to pattern precursors that exhibit
large amounts of shrinkage during drying, topographical distortions develop. In place
of patterning the elastomeric mold, the network of capillary channels was patterned
directly into the substrate surface and an elastomer membrane is used to complete the
channels. When the wetting properties of the substrate surfaces were carefully
controlled using self-assembled monolayers (SAMs), lead zirconate titanate thin films
with nearly rectangular cross-sections were successfully patterned. This technique,
called microchannel molding ( CM), also provided a method for aligning multiple
layers such as bottom electrodes for device fabrication.
I. INTRODUCTION
Soft lithography1
has proved to be a popular tool
among researchers in search of a low-cost means to pat-

  

Source: Aksay, Ilhan A. - Department of Chemical Engineering, Princeton University

 

Collections: Materials Science