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Summary: OPTO-ACOUSTIC OSCILLATOR USING SILICON MEMS OPTICAL MODULATOR
Suresh Sridaran and Sunil A. Bhave
OxideMEMS Lab, Cornell University, Ithaca, NY, USA
ABSTRACT
We show operation of a silicon MEMS based narrow-
band optical modulator with large modulation depth by
improving the electro-mechanical transducer. We
demonstrate an application of the narrowband optical
modulator as both the filter and optical modulator in an
opto-electronic oscillator loop to obtain a 236.22 MHz
Opto-Acoustic Oscillator (OAO) with phase noise of -68
dBc/Hz at 1 kHz offset.
KEYWORDS
Opto-Acoustic Oscillator, MEMS based Optical
Modulator, RF MEMS resonator, Optomechanics
INTRODUCTION
Hybrid oscillators such as the optical delay line
based Opto-Electronic Oscillators (OEOs) have superior
phase noise compared to quartz and acoustic MEMS
oscillators in the 1-30 GHz frequency range [1]. The
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