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A HIGH-Q LENGTH-EXTENSIONAL BULK-MODE MASS SENSOR WITH ANNEXED SENSING PLATFORMS
 

Summary: A HIGH-Q LENGTH-EXTENSIONAL BULK-MODE MASS SENSOR WITH ANNEXED
SENSING PLATFORMS
Zhili Hao, Reza Abdolvand, and Farrokh Ayazi
Integrated MEMS Laboratory, School of Electrical and Computer Engineering,
Georgia Institute of Technology, 777 Atlantic Drive, Atlanta, GA 30332-0250, USA
ABSTRACT
This paper presents a length-extensional bulk-mode
mass sensor with annexed sensing platforms and on-
chip integrated capacitive transducers. The utilization of
the bulk-mode vibrations of a resonant microstructure
enables higher mass sensitivity at the micro-scale and
high quality factor (Q) in air. Besides overcoming
technical issues inherent with cantilever-based mass
sensors, the annexed sensing platforms cover a large
range of mass sensitivity within a single sensor-array
chip. The measured highest mass sensitivity of this
device is 215Hz/pg operating at 13MHz with a Q~4,000
in air.
1. INTRODUCTION
Micro/nano-cantilever resonators coated with selective

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering