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1526 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 17, NO. 6, DECEMBER 2008 A Mode-Matched Silicon-Yaw Tuning-Fork
 

Summary: 1526 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 17, NO. 6, DECEMBER 2008
A Mode-Matched Silicon-Yaw Tuning-Fork
Gyroscope With Subdegree-Per-Hour Allan
Deviation Bias Instability
Mohammad Faisal Zaman, Member, IEEE, Ajit Sharma, Member, IEEE,
Zhili Hao, Member, IEEE, Member, ASME, and Farrokh Ayazi, Senior Member, IEEE
Abstract--In this paper, we report on the design, fabrication,
and characterization of an in-plane mode-matched tuning-fork
gyroscope (M2
-TFG). The M2
-TFG uses two high-quality-factor
(Q) resonant flexural modes of a single crystalline silicon mi-
crostructure to detect angular rate about the normal axis. Oper-
ating the device under mode-matched condition, i.e., zero-hertz
frequency split between drive and sense modes, enables a Q-factor
mechanical amplification in the rate sensitivity and also improves
the overall noise floor and bias stability of the device. The M2
-TFG
is fabricated on a silicon-on-insulator substrate using a combi-
nation of device and handle-layer silicon etching that precludes

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering